OS GSO ISO/TR 22335:2009
ISO/TR 22335:2007
Omani Standard
Current Edition
·
Approved on
11 February 2009
Surface chemical analysis - Depth profiling – Measurement of sputtering rate – mesh-replica method using a mechanical stylus profilometer
OS GSO ISO/TR 22335:2009 Files
English
18 Pages
Current Edition
Reference Language
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OS GSO ISO/TR 22335:2009 Scope
This Technical Report describes a method for determining ion-sputtering rates for depth profiling
measurements with Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS) where
the specimen is ion-sputtered over a region with an area between 0,4 mm2 and 3,0 mm2. This Technical
Report is applicable only to a laterally homogeneous bulk or single-layered material where the ion-sputtering
rate is determined from the sputtered depth, as measured by a mechanical stylus profilometer, and sputtering
time.
This Technical Report provides a method to convert the ion-sputtering time scale to sputtered depth in a depth
profile by assuming a constant sputtering velocity. This method has not been designed for, or tested using, a
scanning probe microscope system. It is not applicable to the case where the sputtered area is less than
0,4 mm2 or where the sputter-induced surface roughness is significant compared with the sputtered depth to
be measured
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